고무 점착척

PSC
고체와 액체의 중간 형태의 반유동체로서 고무 자체의 자기 점착성과 피흡착 물질과의 접촉에 의한 계면 장력을 이용하여 기판을 흡착하는 척
Specifications
Dielectric Silicone, Urethane
Dimensions Size ≤ 200 * 200mm
Thickness 1 ~ 3 mm
Chucking Force 0.5 ~ 5.0 kgf/㎠
Operating Temperature ≤ 60 ℃
Electrical Properties Electrical Character 10E6~9
Surface Flatness <0.1mm
* If an issue occurs with the product, Determine warranty after Aegisco self-test & evaluation.


Diaphragm PSC
고탄성 소재로 내압성을 향상시킨 점착척으로 Chucking 및 De-Chucking 용이
Specifications
Dielectric Silicone, NR
Dimensions Size ≤ 300 * 300mm
Thickness 2 ~ 5 mm
Allowable Pressure ≤ 0.3 Mpa
Cycle Time ≤ 5sec
Chucking Force 0 ~ 2.0 kgf/㎠
Operating Temperature ≤ 100 ℃
Electrical Properties Electrical Character 10E6~9
Surface Flatness <0.2mm
* If an issue occurs with the product, Determine warranty after Aegisco self-test & evaluation.