Specifications | ||
---|---|---|
Dielectric | Silicone, Urethane | |
Dimensions | Size | ≤ 200 * 200mm |
Thickness | 1 ~ 3 mm | |
Chucking Force | 0.5 ~ 5.0 kgf/㎠ | |
Operating Temperature | ≤ 60 ℃ | |
Electrical Properties | Electrical Character | 10E6~9 |
Surface Flatness | <0.1mm |
Specifications | ||
---|---|---|
Dielectric | Silicone, NR | |
Dimensions | Size | ≤ 300 * 300mm |
Thickness | 2 ~ 5 mm | |
Allowable Pressure | ≤ 0.3 Mpa | |
Cycle Time | ≤ 5sec | |
Chucking Force | 0 ~ 2.0 kgf/㎠ | |
Operating Temperature | ≤ 100 ℃ | |
Electrical Properties | Electrical Character | 10E6~9 |
Surface Flatness | <0.2mm |