세라믹 정전척
Ceramic ESC
세라믹 정전척은 당사 특허에 의거하여 제작된 제품이며, 고순도 소재를 사용하여 내전압 특성이 뛰어납니다.
Specifications |
Model Name |
JB-A-001 |
JW-Z-001 |
CI-A-001 |
SW-T-001 |
Color |
Black |
White |
Ivory |
White |
Dimensions |
Dielectric Material Thickness |
1 ~ 3T |
1 ~ 2T |
1T |
0.15 ~ 0.5T |
Wafer Size Compatibility |
≤ 12” |
Operating Temperature |
-20 °C to 100 °C |
Operating Voltage |
~ 3 kV DC |
~ 3 kV DC |
~ 5 kV DC |
~ 3 kV DC |
Chucking Force |
≤ 20 gf/㎠ |
≤ 20 gf/㎠ |
≤ 10 gf/㎠ |
≤ 30 gf/㎠ |
Surface Flatness |
≥ 20 ㎛ |
Surface Roughness (Ra) |
≥ 0.1 ㎛ |
- |
Ceramic Characteristics |
Compressive Strength |
≥ 1,000 Mpa |
≥ 1,000 Mpa |
≥ 1,000 Mpa |
≥ 1,000 Mpa |
Heat Shock Strength |
≥ △ 200 ℃ |
≥ △ 200 ℃ |
≥ △ 200 ℃ |
≥ △ 100 ℃ |
Applications |
Etching / Inspecting / Measurement / Packaging Process in Semiconductor |
Figures |
 |
 |
 |
 |
According to Surface Roughness
According to Thickness
Comparison with J-R and Coulomb