고무 정전척 (Rubber ESC)
High Performance
Ultra-durable
Rubber Electrostatic Chuck
High Performance
Long life-time
Aegisco has developed the RB-ESC (Rubber ESC), a groundbreaking ESC specifically engineered for high-pressure processes such as TBDB (Temporary Bonding and De-bonding) and OLED lamination. This RB-ESC is fully operational at temperatures up to 200°C and boasts exceptional durability, remaining intact even under extreme pressure due to its unique rubber properties. It delivers superior chucking force and enhanced durability compared to traditional Ceramic ESC.
Aegisco has developed the RB-ESC (Rubber ESC), a groundbreaking ESC specifically engineered for high-pressure processes such as TBDB (Temporary Bonding and De-bonding) and OLED lamination. This RB-ESC is fully operational at temperatures up to 200°C and boasts exceptional durability, remaining intact even under extreme pressure due to its unique rubber properties. It delivers superior chucking force and enhanced durability compared to traditional Ceramic ESC.
Rubber ESC
Elastomer Materials Type
Bonding Technology
Possible to use @200℃
None Scratch
High Durability
Performance
- Usable Temp. @200℃
- Temperature Uniformity
- None Scratch
Materials
- High-density Ceramic
- Highest breakdown voltage strength
Design
- He Groove / Mesa
- Surface Embossing
- Minimizing He Leak
| Specifications | ||
|---|---|---|
| Dielectric | Elastic Materials | |
| Dimensions | Size | ≤ 12” , 150 x 150 (mm) |
| Thickness | ≥ 15 ㎜ | |
| Operating Temperature | ≤ 200 ℃ | |
| Operating Voltage | ~ 5.0 kV DC | |
| Chucking Force | ≤ 30 gf/㎠ | |
| Surface Flatness | ≥ 20 ㎛ | |
